MKS Instruments’ latest pressure transducer has close coupled control electronics and is heated to 150iC. The high temperature of the 631 Baratron is said to prevent the build-up of particles and condensable contaminants in the sensor head.
The sensor is suitable for applications such as semiconductor chemical vapour deposition process and nitride coating applications. Close-coupled on-board electronics improve measurement accuracy and repeatability and give the type 631 an accuracy of +/-0.25% of reading.
MKS INSTRUMENTS ON EXPRESS ENQUIRY CARD 201