NanoGrowth system goes commercial

Surrey NanoSystems is close to commercialising its high-precision NanoGrowth system for fabricating carbon nanotube structures at low temperatures


Surrey NanoSystems is close to commercialising its high-precision NanoGrowth system. The process will be used for fabricating carbon nanotube structures at low temperatures compatible with commercial semiconductor processes.


Dr Guan Yow Chen of the Newhaven-based company said: ‘At this early stage in the cycle for applying new carbon nanotube materials commercially, the requirement for a stable platform capable of prototyping and fabricating structures repeatably is critical. Our unique tool design provides this capability, combined with flexibility that allows configurations to be built to serve individual development ideas. The tool’s intrinsic modularity allows users to gain automated control over all aspect of nanomaterial synthesis, from catalyst generation to final material processing.’


The company developed its processing technique in partnership with SurreyUniversity’s Advanced Technology Institute, and was helped with independent test-bed services for its unique processing recipes by a major European research laboratory.


The company’s first tool is NanoGrowth 1000n, which comes with both CVD (chemical vapour deposition) and PECVD (plasma-enhanced CVD) processing capability. Surrey Nanosystems said that these two techniques provide processing versatility for users.