Efficient thin-film deposition

Surrey NanoSystems claims it will extend research into thin-film deposition following a significant sputtering tool order from Romania’s National Institute of Materials Physics.


Surrey NanoSystems claims it will be extending research into thin-film deposition following a significant sputtering tool order from the Low Dimensional Systems Laboratory of Romania’s National Institute of Materials Physics (NIMP).



Sputtering is a technique used to deposit films of material onto a surface for applications such as integrated circuits, anti-reflection coatings and the creation of thin-film transistors.



NIMP has called for an ultra-high vacuum Gamma sputtering tool to be fitted with additional instrumentation including an ellipsometer and an integrated low-energy electron diffraction (LEED) system. These will provide real-time monitoring of thin-film deposition to increase the efficiency and productivity of the lab’s research into nanostructured materials.



Surrey NanoSystems will also fit the tool with a reactive gas control system that will use optical emission spectroscopy to control a high performance gas injection system.



According to NIMP, Surrey NanoSystems was chosen to supply the sputtering tool for its model purity and ability to provide a fully-integrated solution to the specifications of the order.