Making ICs smaller

Within the framework of a European co-operation between companies, which includes amongst others Leica Microsystems, IMS Vienna and ASM-L in the Netherlands, a new projection unit or so-called ion-stepper is being developed for the production of chips in the next century.

In view of the fact that the structures on the integrated circuits on the chips in the electronic industry are getting smaller and smaller, the light-optical method used for the lithographical manufacture of chip structures will within the next few years reach the limits of the technically possible and economically justifiable. A new method to replace the light-optical projection is therefore increasingly being researched on an international level.