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MPS75SLE data sheet - .PDF file.

Aerotech has introduced the MPS75SLE, a compact, high-performance linear positioning stage for applications such as optics positioning, Z-axis positioning of sensors in surface metrology, and in general purpose high-precision alignment.

The precision-ground, preloaded ball-screw coupled with a low thermal expansion linear encoder is said to provide excellent accuracy, repeatability and a positioning resolution capability to 25nm

Anti-creep, crossed-roller bearings provide smooth travel and high load capacity in a compact package. The low thermal expansion (3.3ppm/°C) precision glass scale encoder results in high-accuracy and repeatable positioning over long periods of time.

The linear encoder is available with amplified sine (1Vpp) or 50nm TTL digital outputs for easy integration with all standard controllers.


Click on the link above to download the data sheet for the MPS75SLE.

Key product features

  • Compact stage with travels to 100mm
  • Precision-ground ball-screw drive
  • High resolution (0.025µm) repeatability (±0.1µm) and accuracy (±0.75µm)
  • MPS75SLE motor options include a DC servomotor with a high-resolution rotary encoder or a
  • stepper motor
  • The SLE is available with and without optional bellows waycovers
  • An optional mounting plate provides direct mounting to both English and metric optical breadboards
  • Quick and straightforward multi-axis configurations are made easily with other MPS linear and rotary stages using the adapter brackets and mounting compatibility of the MPS stage series


Aerotech — manufacturer of high-precision motion control components and systems

Aerotech — manufacturer of high-precision motion control components and systems

Aerotech manufactures the highest-performance motion control components and systems for our customers in industry, government, science and research institutions around the world. Our products include automated nanopositioners; planar and rotary air-bearing stages; high-speed gantries; mechanical-bearing linear, rotary and lift stages; brushless linear and rotary servomotors and drives; standalone and software-based motion controllers; goniometers; and gimbals/optical mounts. Custom, vacuum-prepped and cleanroom-ready positioning systems and components are available. Aerotech’s precision motion control products provide the critical performance for demanding applications in markets including medical devices and life sciences, semiconductors and flat panels, photonics, automotive, data storage, laser processing, military and aerospace, electronic manufacturing and test, assembly, research and development and others requiring high-precision, high-throughput motion solutions.

Motion controls, drives and motors

From our award-winning Automation 3200 32-axis machine controller to our Soloist series single-axis and Ensemble series multi-axis standalone motion controllers, Aerotech provides a controller solution to fit almost any need. Aerotech complements our controllers with our large selection of high-performance brushless linear and rotary servomotors and PWM and linear drives.

Linear and rotary stages, nanopositioners and gantries

Aerotech positioning stages range from economical ballscrew and gear-driven linear and rotary stages to the highest-performance direct-drive linear and rotary stages available, linear-motor-based Cartesian gantry systems, single- and multi-axis air-bearing systems and our complete range of ANT series long-travel nanopositioners.

Custom, vacuum and cleanroom-ready motion systems

If you don’t find a standard product suitable for your application, our expertise and ability to provide custom motion components and systems is unmatched. Our custom manufacturing capability is further augmented by our long history of providing systems for vacuum and cleanroom operation.

Since 1970, Aerotech has been committed to supporting our customers worldwide. We maintain a growing number of direct field sales and engineering offices throughout the US, as well as representatives across the globe. We also operate full sales and service facilities in the UK, Germany, Japan, Taiwan and China.

We’d be happy to assist you with your motion control application. Please use the contact information below to enquire about our services.

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