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Aerotech has developed the Planar HDX, which it says is the most advanced commercially available planar air-bearing platform available. The Planar HDX was designed using an FEA-optimised silicon carbide structure and optimised air-bearing compensation techniques, which provide the highest possible dynamic performance while maintaining its geometric characteristics and positioning accuracy.

Planar HDX

Design enhancements include a new air-bearing compensation strategy that increases stiffness and load capacity for demanding high-dynamic applications. Using proven air-on-air preloading in critical bearing elements improves turnaround and settling times over vacuum-preloaded designs.

A proprietary reaction-mass design dramatically reduces stage-induced forces in the step-axis that are transferred to the isolation system or customer’s structure (optics, sensors, etc.). By minimising these dynamic forces, move-and-settle time is reduced and process throughput is increased.

The Planar HDX is available with passive or active isolation systems. Additional axes such as Z-tip-tilt or Z-theta designs as well as custom wafer load/unload mechanisms and wafer chucks are available. Machine weldments, complex granite base structures, or enclosures can also be provided. Feedback options include low-expansion glass scale encoders or interferometer.

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Key product features

  • Silicon-carbide structure for high-dynamics and ultra-precise motion performance.
  • Speeds to 1.5 m/s and accelerations to 5 g.
  • Reduced stage-induced forces in the step-axis.
  • Proprietary reaction-mass design enables fast turnaround and move-and-settle times.
  • Active and passive isolation systems.

 

Aerotech

Aerotech — manufacturer of high-precision motion control components and systems

Aerotech — manufacturer of high-precision motion control components and systems

Aerotech manufactures the highest-performance motion control components and systems for our customers in industry, government, science and research institutions around the world. Our products include automated nanopositioners; planar and rotary air-bearing stages; high-speed gantries; mechanical-bearing linear, rotary and lift stages; brushless linear and rotary servomotors and drives; standalone and software-based motion controllers; goniometers; and gimbals/optical mounts. Custom, vacuum-prepped and cleanroom-ready positioning systems and components are available. Aerotech’s precision motion control products provide the critical performance for demanding applications in markets including medical devices and life sciences, semiconductors and flat panels, photonics, automotive, data storage, laser processing, military and aerospace, electronic manufacturing and test, assembly, research and development and others requiring high-precision, high-throughput motion solutions.

Motion controls, drives and motors

From our award-winning Automation 3200 32-axis machine controller to our Soloist series single-axis and Ensemble series multi-axis standalone motion controllers, Aerotech provides a controller solution to fit almost any need. Aerotech complements our controllers with our large selection of high-performance brushless linear and rotary servomotors and PWM and linear drives.

Linear and rotary stages, nanopositioners and gantries

Aerotech positioning stages range from economical ballscrew and gear-driven linear and rotary stages to the highest-performance direct-drive linear and rotary stages available, linear-motor-based Cartesian gantry systems, single- and multi-axis air-bearing systems and our complete range of ANT series long-travel nanopositioners.

Custom, vacuum and cleanroom-ready motion systems

If you don’t find a standard product suitable for your application, our expertise and ability to provide custom motion components and systems is unmatched. Our custom manufacturing capability is further augmented by our long history of providing systems for vacuum and cleanroom operation.

Since 1970, Aerotech has been committed to supporting our customers worldwide. We maintain a growing number of direct field sales and engineering offices throughout the US, as well as representatives across the globe. We also operate full sales and service facilities in the UK, Germany, Japan, Taiwan and China.

We’d be happy to assist you with your motion control application. Please use the contact information below to enquire about our services.

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