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Key features

  • Direct-drive actuation and 6300Hz resonant frequency
  • 0.03nm resolution and 0.02% linearity with direct-metrology capacitive sensor option
  • Closed-loop travels from 10μm to 40μm
  • Open-loop and vacuum versions

Aerotech’s QNPHD linear piezo nanopositioning stages provide the benefits of both a stage and actuator in one compact, high-stiffness package. With a direct-metrology, capacitive sensor feedback option, high resonant frequencies, and high load capacity, the QNPHD is ideal for a wide range of high-speed and high-precision applications such as scanning probe microscopy, disc-drive testing, and semiconductor wafer articulation.

thumbnail_Aerotech QNPHD SeriesA direct-drive actuation design and optimised structure enable millisecond response and move-and-settle times. FEA-optimised precision flexures ensure high-stiffness, long device life, and high-dynamics while maintaining excellent geometric performance (straightness and angular errors) for critical nanopositioning applications.

Optional closed-loop feedback using a unique capacitive sensor design allows for sub-nanometer resolution and single-digit nanometer linearity errors. The capacitive sensors measure the output of the positioning carriage directly enabling superior accuracy and repeatability.

When coupled with Aerotech’s Q-series controllers and drives, the QNPHD demonstrates sub-nanometer positioning resolution and high-positioning bandwidth. Aerotech’s Dynamic Controls Toolbox and Motion Designer software packages provide a host of advanced yet easy-to-use tools such as Learning Control, Harmonic Cancellation, and Command Shaping, providing improved tracking errors and faster step-and-settle times. Aerotech’s FlashConfig feature automatically identifies the stage, all operational parameters, and uploads axis calibration data ensuring safe, accurate, and true “plug-and-play” operation.

The QNPHD is available with rear and side cable exit options along with mounting features for both horizontal and vertical orientations. This flexibility allows the user to orient and package the stage for the most optimal arrangement without designing various adapter plates and brackets that increase size and design complexity. Custom designs and vacuum-prepared versions are available upon request.

Aerotech

Aerotech — manufacturer of high-precision motion control components and systems

Aerotech — manufacturer of high-precision motion control components and systems

Aerotech manufactures the highest-performance motion control components and systems for our customers in industry, government, science and research institutions around the world. Our products include automated nanopositioners; planar and rotary air-bearing stages; high-speed gantries; mechanical-bearing linear, rotary and lift stages; brushless linear and rotary servomotors and drives; standalone and software-based motion controllers; goniometers; and gimbals/optical mounts. Custom, vacuum-prepped and cleanroom-ready positioning systems and components are available. Aerotech’s precision motion control products provide the critical performance for demanding applications in markets including medical devices and life sciences, semiconductors and flat panels, photonics, automotive, data storage, laser processing, military and aerospace, electronic manufacturing and test, assembly, research and development and others requiring high-precision, high-throughput motion solutions.

Motion controls, drives and motors

From our award-winning Automation 3200 32-axis machine controller to our Soloist series single-axis and Ensemble series multi-axis standalone motion controllers, Aerotech provides a controller solution to fit almost any need. Aerotech complements our controllers with our large selection of high-performance brushless linear and rotary servomotors and PWM and linear drives.

Linear and rotary stages, nanopositioners and gantries

Aerotech positioning stages range from economical ballscrew and gear-driven linear and rotary stages to the highest-performance direct-drive linear and rotary stages available, linear-motor-based Cartesian gantry systems, single- and multi-axis air-bearing systems and our complete range of ANT series long-travel nanopositioners.

Custom, vacuum and cleanroom-ready motion systems

If you don’t find a standard product suitable for your application, our expertise and ability to provide custom motion components and systems is unmatched. Our custom manufacturing capability is further augmented by our long history of providing systems for vacuum and cleanroom operation.

Since 1970, Aerotech has been committed to supporting our customers worldwide. We maintain a growing number of direct field sales and engineering offices throughout the US, as well as representatives across the globe. We also operate full sales and service facilities in the UK, Germany, Japan, Taiwan and China.

We’d be happy to assist you with your motion control application. Please use the contact information below to enquire about our services.

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