Product Details Supplier Info More products

Aerotech’s Airlift 115 is a submicron resolution vertical translation stage that maintains an almost perfect straight line performance over a travel range up to 150mm at speeds to 50mm/sec.

The stage features a fully preloaded vertical air bearing in combination with a servomotor-driven precision ground ballscrew.

It has a compact design that includes a drive mechanism without the need for a load counterbalance system.

It is aimed at demanding application areas such as semiconductor testing, nanoscale metrology, optical inspection and laser micro-machining.

The Airlift 115 maintains an angular performance of better than +/-1arc/sec in pitch, yaw and roll for the 50mm travel version.

The range also covers 100 and 150mm travel versions where angular accuracy performance is still within +/-2arc/sec.

Positioning resolution across the range is 50nm with repeatability within +/-0.5um.

Overall calibrated positional accuracy for the 50mm travel version is within +/-1.0um and, for the 150mm travel version, +/-1.5um.

Such specifications allow positioning and micro-manipulation of workpieces to be held to high levels of flatness for applications where an unobstructed view of the work plane is required – such as wafer inspection or laser processing.

The long travel range, high bearing stiffness and high-speed capability also combine for rapid workpiece loading well away from work area, and the horizontal footprint is also said to be relatively small in comparison to tradition vertical stage designs.

The Airlift 115 includes a BSM series brushless and cogless rotary servomotor for ultra-smooth motion with submicron position feedback from a linear encoder mounted directly on the air bearing plane.

An integral brake is included with options for perpendicular or parallel mounting and the complete assembly includes motor, feedback and brake connectors.

The AirlIft 115 may be used as a single ultra-high precision lift mechanism or as a part of a complete multi-axis positioning system with Aerotech’s range of linear and rotary translation stages, drives and motion controls.

Complete positioning sub-systems may include standard components or custom-engineered solutions with modified mechanics, integral machine base, full cable management and advanced motion and machine controls aimed at improving the precision and production throughput performance for applications across manufacturing and research.


Aerotech — manufacturer of high-precision motion control components and systems

Aerotech — manufacturer of high-precision motion control components and systems

Aerotech manufactures the highest-performance motion control components and systems for our customers in industry, government, science and research institutions around the world. Our products include automated nanopositioners; planar and rotary air-bearing stages; high-speed gantries; mechanical-bearing linear, rotary and lift stages; brushless linear and rotary servomotors and drives; standalone and software-based motion controllers; goniometers; and gimbals/optical mounts. Custom, vacuum-prepped and cleanroom-ready positioning systems and components are available. Aerotech’s precision motion control products provide the critical performance for demanding applications in markets including medical devices and life sciences, semiconductors and flat panels, photonics, automotive, data storage, laser processing, military and aerospace, electronic manufacturing and test, assembly, research and development and others requiring high-precision, high-throughput motion solutions.

Motion controls, drives and motors

From our award-winning Automation 3200 32-axis machine controller to our Soloist series single-axis and Ensemble series multi-axis standalone motion controllers, Aerotech provides a controller solution to fit almost any need. Aerotech complements our controllers with our large selection of high-performance brushless linear and rotary servomotors and PWM and linear drives.

Linear and rotary stages, nanopositioners and gantries

Aerotech positioning stages range from economical ballscrew and gear-driven linear and rotary stages to the highest-performance direct-drive linear and rotary stages available, linear-motor-based Cartesian gantry systems, single- and multi-axis air-bearing systems and our complete range of ANT series long-travel nanopositioners.

Custom, vacuum and cleanroom-ready motion systems

If you don’t find a standard product suitable for your application, our expertise and ability to provide custom motion components and systems is unmatched. Our custom manufacturing capability is further augmented by our long history of providing systems for vacuum and cleanroom operation.

Since 1970, Aerotech has been committed to supporting our customers worldwide. We maintain a growing number of direct field sales and engineering offices throughout the US, as well as representatives across the globe. We also operate full sales and service facilities in the UK, Germany, Japan, Taiwan and China.

We’d be happy to assist you with your motion control application. Please use the contact information below to enquire about our services.

View full profile