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‘Using the Galvo calibration file converter with the Nmark CLS’ - .PDF file.

Calibrating the field of view for scanners is typically an iterative process where a series of marks are placed on a substrate and the location of these marks is used to create a calibration file, and the process is repeated to reach final system accuracy. Each iteration of the mark-and-measure sequence must combine the new measurement values with the current calibration table to create a new calibration table. When the tables are of the same resolution, the values can be added directly to each other. When the density of the marks in the tables to be combined is not equal, an algorithm must be applied to interpolate lower-resolution data with higher-resolution data. Aerotech’s Galvo Calibration File Converter (GCFC) application can be used to merge measurement data during the calibration process. The measurement resolutions of the tables to be merged do not have to match as GCFC will interpolate the correction values of the lower-resolution table to match those of the higher-resolution table. This application note will outline the procedures required to create new calibration tables and how to merge calibration tables for the Nmark CLS.

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Aerotech — manufacturer of high-precision motion control components and systems

Aerotech — manufacturer of high-precision motion control components and systems

Aerotech manufactures the highest-performance motion control components and systems for our customers in industry, government, science and research institutions around the world. Our products include automated nanopositioners; planar and rotary air-bearing stages; high-speed gantries; mechanical-bearing linear, rotary and lift stages; brushless linear and rotary servomotors and drives; standalone and software-based motion controllers; goniometers; and gimbals/optical mounts. Custom, vacuum-prepped and cleanroom-ready positioning systems and components are available. Aerotech’s precision motion control products provide the critical performance for demanding applications in markets including medical devices and life sciences, semiconductors and flat panels, photonics, automotive, data storage, laser processing, military and aerospace, electronic manufacturing and test, assembly, research and development and others requiring high-precision, high-throughput motion solutions.

Motion controls, drives and motors

From our award-winning Automation 3200 32-axis machine controller to our Soloist series single-axis and Ensemble series multi-axis standalone motion controllers, Aerotech provides a controller solution to fit almost any need. Aerotech complements our controllers with our large selection of high-performance brushless linear and rotary servomotors and PWM and linear drives.

Linear and rotary stages, nanopositioners and gantries

Aerotech positioning stages range from economical ballscrew and gear-driven linear and rotary stages to the highest-performance direct-drive linear and rotary stages available, linear-motor-based Cartesian gantry systems, single- and multi-axis air-bearing systems and our complete range of ANT series long-travel nanopositioners.

Custom, vacuum and cleanroom-ready motion systems

If you don’t find a standard product suitable for your application, our expertise and ability to provide custom motion components and systems is unmatched. Our custom manufacturing capability is further augmented by our long history of providing systems for vacuum and cleanroom operation.

Since 1970, Aerotech has been committed to supporting our customers worldwide. We maintain a growing number of direct field sales and engineering offices throughout the US, as well as representatives across the globe. We also operate full sales and service facilities in the UK, Germany, Japan, Taiwan and China.

We’d be happy to assist you with your motion control application. Please use the contact information below to enquire about our services.

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