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Liquid analysis Measurement, quality control and test Process and environmental testing

Density sensor monitors slurry health

By Anton Paar Ltd on 11th January 2018

Product Details Supplier Info More products

Download document:

Density-sensor-for-slurry-health - .PDF file.

Chemical mechanical planarization is a critical production step during microcircuit manufacturing. The smaller the electronic components, the more sophisticated the CMP process. The customer goal is to have flat, smooth, polished wafers.

The polishing procedure is performed in clean room where the air contains less than one dust particle per cubic meter. Slurry containing mainly pure water, a chemical reagent and different polishing particles are used between the polishing pad and the wafer. A slurry’s “health” depends on its stability and contamination level. Foreign particles, solved carbon dioxide and ionic contaminations can disturb the polishing process as well as slurry particle aggregates and agglomerates. A dynamic measurement of the slurry properties coupled with defined control limits can be used to determine a slurry health.

Download the application report to understand how the Anton Paar L-Dens 7400 density sensor provides real-time data to indicate slurry health.

Anton Paar Ltd

Anton Paar develops, produces and distributes highly accurate laboratory instruments and process measuring systems, and provides custom-tailored automation and robotic solutions.

Visit our website +44 (0) 1992 514 730

Anton Paar develops, produces and distributes highly accurate laboratory instruments and process measuring systems, and provides custom-tailored automation and robotic solutions.

It is the world leader in the measurement of density, concentration and CO2 and in the field of Rheometry. Other areas of specialty are: Viscometry, Polarimetry, Refractometry, Microwave Sample Preparation & Synthesis, Chemical and Mechanical Surface and Nanostructure Analysis.

With over 2200 employees at the headquarters in Graz (Austria) and the 25 sales subsidiaries worldwide, Anton Paar ensure that their products live up to their excellent reputation. The core competence of the company – high-precision production – and close contact to the scientific community form the basis for the quality of Anton Paar’s instruments.

A strong sales network in more than 110 countries guarantees customers rapid support and answers to their application and service queries.

Innovation is the basis for progress and every year Anton Paar invests more than 20 percent of the annual turnover in R&D.

Anton Paar Limited, a subsidiary of Anton Paar GmbH, provides sales, application support and service to users across the UK and Ireland.

With an office in St Albans (UK) and Dublin (Ireland) and a team of over 30 dedicated employees, Anton Paar Limited aims to provide first-class service at every stage in the customer relationship, ensuring our products live up to their excellent reputation.

Anton Paar Ltd
Unit F, The Courtyard
St Albans
AL4 0LA
UK

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