Product Details Supplier Info More products

The new M-811.STV miniature hexapod from Physik Instrumente (PI) is designed for positioning applications in vacuum chambers where there is very little installation space.

Since the object to be moved is not permanently accessible, a flexible placement of the load (such as a sample) is particularly important.

Measuring 130mm in diameter and 115mm in height, the M-811.STV offers travel ranges of up to 35mm in the XY plane and 13mm in the Z direction.

The hexapod offers large tilting angles of 20deg around the X and Y axis and up to 40deg around the vertical axis.

It reliably positions loads of up to 5kg and achieves velocities of up to 10mm/s.

Each individual strut has a positioning resolution of 40nm; positioning can be carried out repeatedly with accuracies of less than 1um.

The mini hexapod uses a powerful digital controller via Ethernet.

All positions are given in Cartesian co-ordinates.

According to PI, parallel kinematics systems have several advantages over stacked multi-axis positioners.

All six actuators act on a joint platform, which keeps the moved mass low.

There is no summation of the lateral run-out and tilts of individual axes.

The pivot point can be selected as desired via software commands and thus remains independent of the movement.

Miniature hexapod suitable for vacuum chambers

The new M-811.STV miniature hexapod from Physik Instrumente (PI) is designed for positioning applications in vacuum chambers where there is very little installation space.

Since the object to be moved is not permanently accessible, a flexible placement of the load (such as a sample) is particularly important.

Measuring 130mm in diameter and 115mm in height, the M-811.STV offers travel ranges of up to 35mm in the XY plane and 13mm in the Z direction.

The hexapod offers large tilting angles of 20deg around the X and Y axis and up to 40deg around the vertical axis.

It reliably positions loads of up to 5kg and achieves velocities of up to 10mm/s.

Each individual strut has a positioning resolution of 40nm; positioning can be carried out repeatedly with accuracies of less than 1um.

The mini hexapod uses a powerful digital controller via Ethernet.

All positions are given in Cartesian co-ordinates.

According to PI, parallel kinematics systems have several advantages over stacked multi-axis positioners.

All six actuators act on a joint platform, which keeps the moved mass low.

There is no summation of the lateral run-out and tilts of individual axes.

The pivot point can be selected as desired via software commands and thus remains independent of the movement.

View full profile