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Keithley Instruments has enhanced its S530 Parametric Test Systems, which address DC and C-V measurements in process control monitoring, process reliability monitoring and device characterisation.

Enhancements include the addition of: Keithley’s high-throughput switch mainframe for high-integrity signal switching; full Kelvin measurements at the probe card for greater low-ohms accuracy; new hardware protection modules that safeguard sensitive system instruments from high voltages; and a complete range of ‘probes up’ system specifications and diagnostic tools.

S530 systems are designed for use in production parametric test environments that must accommodate a broad mix of products or wherever wide application flexibility and fast test-plan development are critical.

The proven source-measure technology and high-fidelity signal pathways on which S530 testers are based ensure measurement accuracy and repeatability.

Two different S530 systems are available: a low-current version developed for measuring characteristics such as sub-threshold leakage, gate leakage and so on; and a high-voltage version for the difficult breakdown and leakage tests that GaN, SiC and Si LDMOS power devices demand.

The S530 Low Current System, from two to eight SMU channels, provides sub-picoamp measurement resolution and low-current guarding all the way to the probe pin.

The S530 High Voltage System, from three to seven SMU channels, incorporates a source-measure unit capable of sourcing up to 1,000V at 20mA (20W max).

S530 parametric test systems are designed to speed and simplify wafer and test-plan setup by providing immediate feedback to the engineer throughout test project development.

For example, the Automated Characterisation Suite (ACS) software that controls S530 systems streamlines test-project development by allowing new test scripts to be tested interactively without compromising throughput in full automatic mode.

ACS also provides for offline test project development and test results analysis.

S530 systems employ Version 4.3 of the powerful ACS software on which several other proven Keithley test systems operate, which improves lab-to-fab correlation and speeds system learning.

ACS maximises the efficiency and flexibility of S530 systems, combining all the elements necessary for automated parametric testing in a single integrated package.

All S530 systems are equipped with high-power SMUs, which provide up to 20W of source or sink capability on both the 200V and 20V ranges, for complete characterisation of the high-power devices and circuits prevalent in modern mobile devices.

Whether the application is testing LDMOS Si or GaN BJTs, this higher power capability provides enhanced visibility into device performance.

It also ensures S530 systems can test high-power devices without compromising the low-current sub-picoamp sensitivity needed to monitor mainstream device processes.

The S530 High Voltage System offers 1kV to any probe card pin on up to 32 pins, permitting high-voltage- and low-current-sensitive measurements in a single pass, enabling the accurate characterisation of high-power devices.

The system’s high voltage SMU can source up to 1,000V at 20mA (20W max.).

Each S530 test system employs a high-performance switch matrix and high-fidelity signal pathways to direct signals between instruments and test pins.

The performance of these pathways directly influences the performance of the test system as a whole by setting upper current and voltage ranges, and limiting low-level measurements due to current offsets.

The S530 has eight pathways that can be used to route instruments to pins dynamically.

For example, up to eight SMUs can be routed to any pin (or number of pins) at one time.

The Low Current System delivers uniform performance across all eight pathways; the High Voltage System provides two high-voltage/low-leakage pathways, four general-purpose pathways and two C-V pathways.

Both systems support C-V measurements up to 2MHz.

All source-measure units (SMUs) built into S530 Parametric Test Systems are based on Keithley’s production-qualified instrument technology to ensure measurement accuracy, repeatability and extended hardware life.

The SMUs are four-quadrant sources, so they can source or sink current or voltage.

In addition to precision-sourcing circuits, they include programmable limits (compliance) across all ranges, which helps protect both devices and probe tips from damage due to device breakdown.

Each SMU also measures both voltage and current while sourcing, ensuring that parameter calculations reflect actual conditions rather than simply the programmed conditions.

All S530 systems can be equipped with a high-speed capacitance meter for C-V measurements up to 2MHz to any pin.

This C-V unit can measure a 10pF capacitor at 1MHz with three per cent accuracy.

S530 Parametric Test Systems include production qualifications including built-in diagnostics, system specifications to the probe card and compliance with industry standards such as CE, SemiS2, and S8.

A ‘command line’ control interface in ACS simplifies adapting to custom user interfaces or a factory automation host controller.

Both system configurations are available now.

Keithley Instruments

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