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The P-563.3CD PI Mars stage from Physik Instrumente (PI) is suitable for use within micromanufacturing, biotechnology, nanotechnology, scanning microscopy, nano manipulation, nano imprint, semiconductor and data storage test equipment.

The unit — which is a piezo flexure-guided scanning nano manipulation system — enables motion control at sub-nanometre resolutions as well as 340 x 340 x 340µm travel in XYZ.

The stage’s XYZ system incorporates one moving part — a single module — and features a parallel direct-motion metrology feedback system made up of non-contact sensors that monitor the platform in reference to the ground from the outside. This enables them to monitor off-axis and run-out errors and allows the user to remove unwanted motion in real time.

PI also offers a range of analogue and digital controllers in bench-top, OEM-board and rack-mount designs to drive the stages.

Key features

  • Integrated, direct-measuring capacitance sensors
  • Digital closed-loop control
  • High-force solid-state piezo actuator drives
  • Frictionless flexure guiding systems
  • Absolute measuring capacitive position sensors

Physik Instrumente

PI is a global manufacturer of high precision positioning systems and products based on piezo technology. Used in markets as diverse as biotechnology, semiconductor, defence and astronomy, PI’s products work to improve the speed and precision of many cutting edge processes. Actuators, sensors and positioning systems with either sub-micron or nanometre level precision; many customised for the end user, are included in the product range.

With manufacturing and subsidiary offices around the world and a workforce of more than 500 PI provides direct local support where it is needed. Products range from component level piezo ceramic assemblies to six axis hexapod positioning robots. PI manufactures its own piezo ceramic material including multilayer devices that incorporate its patented ceramic insulation technology. Lead free ceramic technology is now also included in the company’s product range. With the flexibility and continuity of supply offered by having control of piezo ceramic production comes security and speed of delivery for customers who rely on or are looking to move into this area of technology. PI’s piezo ultrasonic and step drive motor technologies offer unique performance including self-locking capability, high force or high speed and non-magnetic and vacuum compatibility.

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