Product Details Supplier Info More products

Physik Instrumente (PI) has launched the P-563.3CD PIMars stage, which is a piezo flexure-guided scanning nanomanipulation system.

The unit enables precision motion control with resolution in the sub-nanometre realm and 340 x 340 x 340um travel in XYZ.

Integrated, direct-measuring capacitance sensors and digital closed-loop control are claimed to boost linearity by up to three orders of magnitude over conventional piezo stages.

Applications include micromanufacturing, biotechnology, nanotechnology, scanning microscopy, nano-manipulation, nano-imprint, semiconductor and data-storage test equipment.

PIMars stages incorporate high-force solid-state piezo actuator drives, frictionless flexure guiding systems and absolute measuring capacitive position sensors.

The high force of the solid-state piezo actuators allows for fast response in the millisec range and high scanning frequencies.

PIMars stages are based on a different design principle than conventional scanning stages.

The XYZ system consists of only one moving part, a single module rather than three individual stacked modules.

This ‘parallel-kinematics’ mechanical design is complemented by a parallel direct-motion metrology feedback system.

With parallel direct metrology, all non-contact sensors monitor the moving platform in reference to ground ‘from the outside’.

They can ‘see’ off-axis and run-out errors.

The controller then eliminates unwanted motion in real time.

Conventional serial-metrology sensors (integrated in each axis) cannot detect off-axis errors, according to PI.

The company added that parallel motion metrology allows for higher overall XYZ precision.

A variety of analogue and digital controllers in bench-top, OEM board, and rack-mount designs are available to drive the units.

PIMars stage enables precision motion control

Physik Instrumente (PI) has launched the P-563.3CD PIMars stage, which is a piezo flexure-guided scanning nanomanipulation system.

The unit enables precision motion control with resolution in the sub-nanometre realm and 340 x 340 x 340um travel in XYZ.

Integrated, direct-measuring capacitance sensors and digital closed-loop control are claimed to boost linearity by up to three orders of magnitude over conventional piezo stages.

Applications include micromanufacturing, biotechnology, nanotechnology, scanning microscopy, nano-manipulation, nano-imprint, semiconductor and data-storage test equipment.

PIMars stages incorporate high-force solid-state piezo actuator drives, frictionless flexure guiding systems and absolute measuring capacitive position sensors.

The high force of the solid-state piezo actuators allows for fast response in the millisec range and high scanning frequencies.

PIMars stages are based on a different design principle than conventional scanning stages.

The XYZ system consists of only one moving part, a single module rather than three individual stacked modules.

This ‘parallel-kinematics’ mechanical design is complemented by a parallel direct-motion metrology feedback system.

With parallel direct metrology, all non-contact sensors monitor the moving platform in reference to ground ‘from the outside’.

They can ‘see’ off-axis and run-out errors.

The controller then eliminates unwanted motion in real time.

Conventional serial-metrology sensors (integrated in each axis) cannot detect off-axis errors, according to PI.

The company added that parallel motion metrology allows for higher overall XYZ precision.

A variety of analogue and digital controllers in bench-top, OEM board, and rack-mount designs are available to drive the units.

View full profile