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The Resolute UHV ultra-high-vacuum-compatible readhead from Renishaw is designed to offer true absolute position feedback, submicron accuracy and resolutions to 1nm for both linear and rotary applications.

The new RoHS-compliant encoder is constructed from clean, vacuum-compatible materials and adhesives to give low outgassing rates and clean residual gas analysis, making the device suitable for semiconductor and scientific applications requiring vacuum compatibility to 10 Torr.

Like the standard range of Resolute encoders, the new ultra-high-vacuum variant determines position immediately upon switch-on, without the need for any movement or battery back-up.

Instant commutation means that axes are immediately under complete control after power loss, thus eliminating risks of unchecked movements or collisions; this is said to benefit applications such as wafer handling, where the safe extraction of high-value wafers is critical.

Key features

  • Built-in separate and independent position-checking algorithm, which actively checks every reading, ensuring any potential problem is flagged before it reaches the controller
  • Pure serial communications with cyclic redundancy check (CRC), which eliminates the need for auxiliary 1Vpp signals, offers higher noise immunity and detects data corruption
  • Serial protocols including BiSS, Fanuc, Mitsubishi and Panasonic
  • RFI-screened UHV-compatible cable
  • Linear scales in either stainless steel or Zeromet low-thermal-expansion alloy with accuracy to better than ±1µm on lengths of up to 1.13m
  • Stainless steel rotary rings, which feature large through-holes and patented taper mounting to ensure the quick, easy and precise adjustment of eccentricity

Renishaw

A world leader in engineering technologies, Renishaw’s core skills in measurement and precision machining serve sectors as diverse as dimensional metrology, spectroscopy, machine calibration, motion control, dentistry and surgical robotics.

A world leader in engineering technologies, Renishaw’s core skills in measurement and precision machining serve sectors as diverse as dimensional metrology, spectroscopy, machine calibration, motion control, dentistry and surgical robotics.

Sensors for co-ordinate measuring machines (CMMs) are an industry standard, from basic touch-trigger probes through to automated stylus and probe changers, motorised indexing probe heads, and revolutionary five-axis measurement systems.

Machine probes for CNC machine tools allow automated tool setting, workpiece set-up, in-cycle gauging and part inspection. Products include laser tool setters, contact tool setters, tool breakage detectors, touch probes and high accuracy inspection probes.

For motion control, Renishaw supplies laser encoders, optical linear encoders, optical angle encoders, optical rotary encoders, magnetic rotary encoders, magnetic chip encoders and magnetic linear encoders.

To analyse the static and dynamic performance of position-critical motion systems, Renishaw’s laser interferometer and environmental compensation system offers a linear measurement accuracy of 0.5 ppm, readings of up to 50 kHz and a linear measurement speed of up to 4 m/s, with a linear resolution of 1nm.

Renishaw’s Raman spectroscopy products exploit the Raman effect to identify and characterise the chemistry and structure of materials. A diverse range of analytical applications include pharmaceutical, forensic science, nanotechnology, biomedical and semiconductors.

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