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At Vacuum Expo, Renishaw will focus on its position feedback encoders designed specifically for use in ultra-high vacuum conditions.

The products on show include the new range of Tonic UHV encoders, available in linear and angle encoder formats, which combine the features of high-accuracy linear scales with optical reference marks and high-fidelity position feedback.

All of Renishaw’s UHV encoders are constructed from vacuum-compatible materials and adhesives to give low outgassing rates and proven clean residual gas analysis (RGA), and are suitable for bake-out temperatures of 120C.

They are all suitable for high performance, semiconductor and scientific applications.

Like the standard range of Tonic read heads, the ultra-high vacuum variants use the latest generation of Renishaw’s filtering optics, now optimised for ultra-low noise.

The advanced optics design is further augmented by dynamic signal conditioning including auto gain control (AGC) and auto offset control (AOC).

The results are output signals of exceptional purity, providing SDE of +/-30nm, noise (jitter) around 0.5nm RMS and resolutions to 1nm.

All Tonic scales include the In-Trac optical reference mark, directly embedded into the incremental channel, facilitating automatic electronic phasing with the press of a button – a function that can be carried out remotely.

The In-Trac reference mark remains phased at all speeds and throughout the entire operating temperature range.

For linear position feedback with the Tonic UHV range, motion system designers can choose between a variety of scales, all with clean RGA spectra, including RELM Invar spars with ‘zero’ thermal expansion coefficient and total accuracy guaranteed better than +/-1um on lengths up to 1,130mm.

Also in the range are high-accuracy RSLM stainless-steel spars and RTLC stainless-steel tape scales, along with Renishaw’s RGSZ tape scale.

For rotary applications, the Tonic UHV angle encoder read head is compatible with Renishaw’s precisely graduated rotary scales with In-Trac optical reference marks, including RESM and REXM ultra-high accuracy rings.

RESM rings are made from monolithic 300-series stainless steel without any coatings, meaning they can be subjected to specialist cleaning and degreasing if required.

To simplify design, the rings also feature a large through hole with a small cross-section and a taper mount for fine run-out adjustment.

For the highest-performance rotary axes, designers can choose REXM ultra-high accuracy rings, which can also be used with dual UHV read heads to achieve total installed accuracy of better than +/-1 arc second.

Vacuum Expo takes place at the International Centre, Telford, UK, from 3-4 November 2010.

Renishaw

A world leader in engineering technologies, Renishaw’s core skills in measurement and precision machining serve sectors as diverse as dimensional metrology, spectroscopy, machine calibration, motion control, dentistry and surgical robotics.

A world leader in engineering technologies, Renishaw’s core skills in measurement and precision machining serve sectors as diverse as dimensional metrology, spectroscopy, machine calibration, motion control, dentistry and surgical robotics.

Sensors for co-ordinate measuring machines (CMMs) are an industry standard, from basic touch-trigger probes through to automated stylus and probe changers, motorised indexing probe heads, and revolutionary five-axis measurement systems.

Machine probes for CNC machine tools allow automated tool setting, workpiece set-up, in-cycle gauging and part inspection. Products include laser tool setters, contact tool setters, tool breakage detectors, touch probes and high accuracy inspection probes.

For motion control, Renishaw supplies laser encoders, optical linear encoders, optical angle encoders, optical rotary encoders, magnetic rotary encoders, magnetic chip encoders and magnetic linear encoders.

To analyse the static and dynamic performance of position-critical motion systems, Renishaw’s laser interferometer and environmental compensation system offers a linear measurement accuracy of 0.5 ppm, readings of up to 50 kHz and a linear measurement speed of up to 4 m/s, with a linear resolution of 1nm.

Renishaw’s Raman spectroscopy products exploit the Raman effect to identify and characterise the chemistry and structure of materials. A diverse range of analytical applications include pharmaceutical, forensic science, nanotechnology, biomedical and semiconductors.

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