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The Truplasma RF1003 from Trumpf Huttinger is a plasma power supply for plasma excitation designed to optimise semiconductor manufacturing applications.

The Truplasma RF1003 provides an output power range of 1-3000W, operating at a frequency of 13.56MHz.

For demanding coating and etching processes, it delivers the required power at high accuracy and reliability.

It is also ideal for providing the best productivity results in solar cell production.

Indeed, wherever RF power is required for demanding film deposition and surface treatment processes, the Truplasma RF1003 is a good solution, Trumpf Huttinger said.

The company’s patent-pending Combineline technology provides true 50ohm output impedance.

In the case of a mismatch, any critically high level of reflected RF power is internally absorbed without any risk of damage to the generator.

Combineline creates stable plasma conditions for optimum process results.

It also ensures that the power supply can deliver an optimal level of process power into the plasma with a wide range of varying impedance.

This yields the best process stability across the complete power range, allowing high productivity without the risk of increased downtime.

A power control feature allows the Truplasma RF1003 to operate with uniform accuracy and continuous output power across the power range.

Each process is therefore supplied with the exact power it needs; a factor that is particularly beneficial in the lower range.

The 80 per cent plus energy conversion rating of the Truplasma RF1003 means that in addition to being characterised by high performance the system also has low running costs.

The power supply also has a small footprint, and any length of cable can be used to connect it, providing greater OEM flexibility.


Remaining profitable today is a challenge and staying competitive in the future requires solutions that can adapt to your every-changing business needs. The technology built into TRUMPF precision machinery gives fabricators the flexibility to increase the efficiency of their high-quality, close-tolerance part production – in small batches or high volume jobs.

TRUMPF ranks among the world's leading manufacturers of production technology and industrial lasers. Technical solutions for its customers have been the company's focus since 1923. In every technology group TRUMPF machines are designed to minimise unit costs and to provide reliability and a rapid return on investment.

All machines are designed to accept flexible and expandable automation. The choices range from simple productivity gains from features such as automatic laser nozzle exchange through to all the elements necessary for full lights out production.

In the field of CO2 and solid state production lasers the TRUMPF product spectrum is now unparalleled and its experience extends from OEM systems to small hand-manipulation processing stations through to large 5-axis machines. It has competence at any level of power from 2W to 20kW.

The production processes for which TRUMPF lasers are designed are numerous and include welding, cutting, drilling, tube processing, surface treatment, additive manufacturing and component marking.

TRUMPF punching is much more than simply making holes. The TruPunch range of machines provides complete part processing – including forming – and virtually eliminates the need for secondary processing. And in its TruMatic series these benefits are combined with laser cutting; the best of both worlds.

The TRUMPF TruBend press brakes use patented technology to ensure that the bending angle is precise, right from the start and can handle small, complex or single components cost efficiently. Completing the main technology groups are the TRUMPF TruTool range of power and pneumatic portable fabrication equipment.

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With TRUMPF nothing is left to chance. In every aspect of its business, customers can be assured of quality and exceptionally value for money.

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