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Aerotech’s AXR series two-axis rotary micropositioning assemblies combine yaw and tilt axes that enable high-speed and high-throughput micromachining of complex 3D structures such as MEMS components.

As part of the enabling technology for many microfabrication techniques, the rotary assembly is designed to provide an accurate platform for positioning and manipulation from a precision-aligned hemispherical surface.

With two standard module sizes offering nominal system loads of 15 or 30kg, the AXR includes a direct-drive yaw (B) axis capable of unlimited rotation up to 1,000rpm with a sub arc-sec position resolution.

The second tilt (A) axis offers a fixed rotation over -10 to +100deg and is available with brushless servomotor direct drive for high-speed positioning to 720deg/sec, or for the larger-sized version as a servomotor-driven geared option, with an anti-backlash harmonic gearbox that offers a higher continuous torque suitable for heavier-load applications where lower-speed operation and reduced overall accuracy is tolerable.

A choice of calibrated and uncalibrated versions is available to match specification.

Throughout the range, high-line count optical encoders offer angular resolution to 0.04 arc sec and, using multiplier and advanced amplifier technologies, help to ensure smooth motion and excellent position stability for exacting micromachining.

With HALAR calibration, the all direct-drive version of the AXR can provide a +/-3 arc-sec positional accuracy while the geared version has a +/-5 arc-sec accuracy.

Bi-directional repeatability across the direct-drive versions is +/-1 arc sec, compared with geared versions’ +/-5 arc sec.

Uncalibrated specifications for accuracy are +/-30 arc sec for direct-drive version with +/-50 arc sec for the geared version.

The AXR series features an integral pneumatic rotary union for vacuum or air-activated work holding and the ready-to-run assembly includes motor and feedback cables and connectors.

Both module sizes may be ordered in a choice of configurations, where the yaw axis tabletop is either at the centre of rotation of the tilt axis, or offset at 100mm below the centre of rotation for the smaller assembly or 125mm for the larger version.

The orthogonal mounting accuracy is within 10 arc sec.

All configurations can benefit from an additional sealing option for increased protection against dust and dirt.

Further options include a counterweight attachment to help balance offset loads, a manual three-jaw chuck for the yaw axis for workpiece clamping and a pneumatic locking brake fitted to the tilt axis that limits stage motion during micromachining.

The black anodised aluminium construction includes a yaw-axis tabletop with a matrix of M5 Helicoil inserts for convenient customer fixture interfacing.

Heavy-duty, high-precision bearing sets are used to help guarantee a long working life, which is specified at 20,000 hours MTBF for the non-contacting direct-drive version and 15,000 hours for the geared version.

Aerotech

Aerotech — manufacturer of high-precision motion control components and systems

Aerotech — manufacturer of high-precision motion control components and systems

Aerotech manufactures the highest-performance motion control components and systems for our customers in industry, government, science and research institutions around the world. Our products include automated nanopositioners; planar and rotary air-bearing stages; high-speed gantries; mechanical-bearing linear, rotary and lift stages; brushless linear and rotary servomotors and drives; standalone and software-based motion controllers; goniometers; and gimbals/optical mounts. Custom, vacuum-prepped and cleanroom-ready positioning systems and components are available. Aerotech’s precision motion control products provide the critical performance for demanding applications in markets including medical devices and life sciences, semiconductors and flat panels, photonics, automotive, data storage, laser processing, military and aerospace, electronic manufacturing and test, assembly, research and development and others requiring high-precision, high-throughput motion solutions.

Motion controls, drives and motors

From our award-winning Automation 3200 32-axis machine controller to our Soloist series single-axis and Ensemble series multi-axis standalone motion controllers, Aerotech provides a controller solution to fit almost any need. Aerotech complements our controllers with our large selection of high-performance brushless linear and rotary servomotors and PWM and linear drives.

Linear and rotary stages, nanopositioners and gantries

Aerotech positioning stages range from economical ballscrew and gear-driven linear and rotary stages to the highest-performance direct-drive linear and rotary stages available, linear-motor-based Cartesian gantry systems, single- and multi-axis air-bearing systems and our complete range of ANT series long-travel nanopositioners.

Custom, vacuum and cleanroom-ready motion systems

If you don’t find a standard product suitable for your application, our expertise and ability to provide custom motion components and systems is unmatched. Our custom manufacturing capability is further augmented by our long history of providing systems for vacuum and cleanroom operation.

Since 1970, Aerotech has been committed to supporting our customers worldwide. We maintain a growing number of direct field sales and engineering offices throughout the US, as well as representatives across the globe. We also operate full sales and service facilities in the UK, Germany, Japan, Taiwan and China.

We’d be happy to assist you with your motion control application. Please use the contact information below to enquire about our services.

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