Surface-mount technology

Kinetics Fluid Systems has launched a new generation of modular surface-mount gas system technology which delivers improvements at the assembly and maintenance phases of semiconductor process tooling.

Called K1, the system uses substrate modules that connect in a tongue and groove fashion, and bolt together to interconnect flow components without the need for special tooling. This allows users to build or break down custom gas sticks with ease.

Leak integrity is specified at 10-9atm-cc/sec (He), and severe environmental test have demonstrate integrity after vibration between 3Hz and 300MHz, or after shocks of 75G. This, says the company, compares to failures at less than 40G for conventional systems.

Kinetics Tel: 01753 880406; Fax: 01753 887545; Email: dfirkins@kineticsgroup.com; www.kineticsfluidsystems.com

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