Silicon mirrors resist laser heat to guide beams in high-value machining

The microelectromechanical systems (MEMS) mirrors are the result of a project involving the Fraunhofer Institute for Silicon Technology ISIT in Itzehoe and the Fraunhofer Institute for Material and Beam Technology IWS in Dresden.

“If this technology is accepted there is a lot of potential to use it,” Dresden-based group manager for laser cutting Patrick Herwig told The Engineer.

“It is really easy to integrate,” he added. “It is only a deflection mirror that can also be exchanged for a different frequency or whatever. It is a low-cost tool that allows high-quality processes.”

Potential customers could include laser process head suppliers, Herwig said.

Mass production should make the micromirrors much cheaper than comparable galvanometer scanners, he added.

Materials such as aluminium and high-strength steels are extensively used by the automotive and aircraft manufacturing industries.

Until now laser systems had to be adapted to individual materials, in many cases requiring special optics installed specifically for a particular process.

The micromirrors, which are etched from silicon, offer greater flexibility in processing. They are scanning mirrors that deflect the laser beam and guide it precisely over the workpiece.