‘There are fundamental barriers to progress in semiconductor integration because of the need to find viable processes for next-generation interconnect and dielectric applications,’ said Duncan Cooper of Surrey NanoSystems. ‘Surrey NanoSystems has developed carbon nanotube processes and a nanomaterial deposition tool with the precision and repeatability necessary for these critical applications.’
According to Surrey NanoSystems, the company’s NanoGrowth tool, which comes with chemical vapour deposition (CVD) and plasma-enhanced CVD processing ability, fabricates carbon nanotube and nanomaterial structures to an extremely high degree of precision and has repeatability. It can also grow materials at low temperatures that are compatible with commercial semiconductor processes.
‘The tool’s intrinsic modularity allows users to gain automated control over all aspects of nanomaterial synthesis,’ added Cooper. ‘We are able to discuss the processing techniques and results that the company has gained from our development partnership with Surrey University’s Advanced Technology Institute, plus a parallel agreement that we have in place with a major laboratory that is helping us with independent test-bed services for our unique processes. We will bring our approach to high volume manufacture in tools aimed at the 32nm process node and beyond.’