Air Products announced recently that it will construct a nitrogen trifluoride (NF
3) plant in
to support the fast growing Asian semiconductor and liquid crystal display (LCD) markets.
The new production facility will be operated by Air Products Korea Electronics and will be constructed at the company's specialty gas site in
This will be the company's second Electronic Specialty Material (ESM) investment at
NF3 is used as a chamber cleaning gas in the manufacture of semiconductors, flat panel displays and other electronic devices. When compared with competing products, NF3 is said to offer customers significant reductions in emissions, throughput increases of up to 30 percent, longer chamber life and faster clean rates.
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