New, low profile air bearing based rotary stage

Aerotech’s ABRS series rotary air-bearing positioning stage has ultra-high precision, high speed and high torque · New, low profile air bearing based rotary stage aimed at the most demanding high-throughput applications

Aldermaston - UK, September 2006: With its brushless direct-drive motor, integral precision encoder and an air bearing design combining high stiffness with exceptionally low axial, radial and tilt error motion, Aerotech’s new ABRS series rotary stage represents the ultimate in high precision angular positioning with the added advantage of a very low vertical profile to combat stack-height related errors in multi axis positioning systems.

The new series is available in four sizes with nominal, square dimensions (width x depth) of 150 mm, 200 mm, 250 mm and 300 mm. Table tops have diameters of approximately 20 mm less than the width and each model includes a 360 degree reference scale. The maximum positioning resolution on the largest stage is 0.174 µrad (0.036 arc-sec) with speeds up to 500 rpm. Aimed at demanding high-throughput production and inspection applications, including semiconductor manufacture, optical metrology and nanotechnology device fabrication, the new range combines ultra-smooth and precise angular motion with extreme positioning stability and has further benefits of a very long life with virtually zero maintenance.